On Friday the families of the men who were killed by either police, soldiers or loyalist paramilitaries cleared the first stage of a joint High Court battle over alleged delays in holding the inquests.
Leave was granted to seek judicial reviews in all of the cases, including that of the first man to be shot dead by the PSNI.
Proceedings have been issued by their relatives against the coroner and either the PSNI or Police Ombudsman's Office.
Lawyers for all five families claim their human rights have been breached by the failure to examine the circumstances surrounding each death as soon as possible.
They want a High Court judge to order an immediate date be set for the inquests.
The earliest killing under scrutiny is that of Michael Ryan.
He was one of three IRA men ambushed and shot dead by the SAS in Coagh, Co Tyrone in June 1991.
A car the trio were in was riddled with gunfire and burst into flames.
Their bodies were found inside the burnt out vehicle.
A similar application has been brought on behalf of Catholic man Fergal McCusker.
The 28-year-old was kidnapped and shot dead in Maghera by loyalist paramilitaries in January 1998.
Relatives of Neil McConville, 21, the first person killed by the PSNI, are also challenging the inquest situation.
Mr McConville, from Bleary, Craigavon, was shot following a car chase near Lisburn in April 2003.
Officers were following the vehicle being driven by Mr McConville on the correct suspicion that it was transporting a gun.
Police opened fire amid fears he was about to drive over an officer already knocked down and lying injured directly in his path.
This delay has caused and/or contributed significantly to delay in the conduct of the inquest.
Families' solicitor, Padraig O’Muirigh
Two further police-related deaths are to be examined as well.
James McMenamin, 29, died after he was knocked down by a PSNI Land Rover on Belfast's Springfield Road in June 2005.
Nearly a year later Steven Colwell, 23, was shot dead by police after he failed to stop at a checkpoint in Ballynahinch, Co Down in April 2006.
A subsequent Police Ombudsman's report into the incident found the actions of the officer who opened fire were "critically flawed".
It is claimed in the cases that the State and the Coroner breached their obligations to ensure prompt human rights-compliant investigations into the deaths.
In court on Friday it was fully accepted that an arguable case has been established in four of the five deaths.
Lawyers for the PSNI, named as a joint respondent in the Ryan case, are to inform the judge if they will oppose granting leave to seek a judicial review.
Barrister Sean Doran, appearing for the senior coroner, confirmed that resources will feature in his arguments.
He said: "The evidence to be filed on behalf of the coroner will address as comprehensively as possible the issue of resources that are made available to the Coroners' Service for the purpose of discharging its responsibilities in regard to historical or legacy inquests."
Outside the court the families' solicitor, Padraig O'Muirigh, said: "My clients want an order of mandamus compelling the immediate fix of a date for the hearing of the inquest regarding their loved ones, a declaration that the delay is incompatible with their human rights, and a declaration that the inquest was not held as soon as practicable.
"The families also want a declaration the Chief Constable and/or Police Ombudsman have failed in their duty to promptly disclose details to the coroner."